• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:

    公开号:SU1828547A3
    申请号:SU904743930
    申请日:1990-05-28
    公开日:1993-07-15
    发明作者:Nojkhaus Ditmar
    申请人:Doiche Fortungsanshtalt Fyur L；
    IPC主号:
    专利说明:

    The invention relates to measuring technique and to methods for calibrating an acceleration sensor.
    The aim of the invention is to improve the accuracy of calibration and measurement accuracy of the sensor.
    This goal - improving the accuracy of calibration - is achieved by the fact that in the method of calibrating the acceleration sensor change the density of the medium surrounding the inertial element, and with the same acceleration measure the deviation of the inertial element at different densities of the medium, and on the basis of the dependence of the deviation of the inertial element on the density of the medium determine the absolute acceleration taking into account the known constant of force, a system consisting of inertial and elastic elements.
    This goal, improving the accuracy of measurement, is achieved by the fact that in the acceleration sensor the inertial element is made electrically conductive, the sensitive element is made in the form of a tip directed at the inertia element, equipped with a device for its movement to maintain a constant distance between the inertial element and the tip, while the latter is connected to ampere measuring circuit
    1828547 AZ meter connected to a current source, the positive pole of which is connected through an elastic element to an inertial element, an adjustable voltage source connected to its outputs with electrodes of the handpiece moving device, and the input to the output of the regulator connected to the ammeter, the case being sealed, and its cavity is filled with gas or liquid. In addition, a second similar sensing element is introduced into the sensor, located on the other side of the inertial element, and connected to the introduced second measuring circuit, similar to the first.
    In the acceleration sensor according to the invention, it is not the mass of the inertial element that is changed, but the density of the medium surrounding the inertial element. This changes the lifting force, which causes an inertial element at a certain acceleration. This lifting force is dependent on the volume of the medium displaced by the inertial element and on its density. The greater the acceleration, the greater the difference in lifting forces between both states with different densities of the medium. The acceleration b in the method according to the invention can be determined in accordance with the following equation:
    b = -c · Δχ / ν · Δρ.
    where k is the stress component of the elastic system; Lx - the difference between the deviations of the inertial element in both measurements; ν is the volume of the inertial element, zip is the difference in the densities of the medium in both measurements. Thus, it is possible to calibrate the acceleration sensor by measuring the deviation at the same acceleration and at different densities of the medium in order to determine the origin of the coordinate system, through which a straight line characterizing the relationship between b and x passes, with a known constant effort to the elastic system .
    The change in the density of the medium surrounding the inertial element can be due to the fact that the pressure of the medium in the chamber surrounding the inertial element is changed, or due to the fact that various media, for example, gases, are introduced into this chamber. The density changes with time constants in the range of seconds, so that the acceleration sensor is especially suitable for detecting low-frequency or static accelerations.
    The acceleration sensor can be used to measure accelerations on the ground, where gravitational acceleration g is universal or for measuring accelerations in weightless space, for example, in outer space. In any case, high-frequency calibration is possible, so that the absolute value of acceleration can be determined with high accuracy.
    Haha. 1 is a schematic illustration of the mechanical structure of an acceleration sensor; in FIG. 2 is an electric circuit for adjusting a sensitive element; in FIG. 3 is an embodiment with two sensing elements located on both sides of the inertial element to compensate for such changes in the tunneling current that are caused by changes in density.
    According to FIG. 1, the acceleration sensor has a base 1 on which one end of the elastic element 2 is clamped. The elastic element 2 consists of a thin silicon wafer. Silicon is particularly well suited as an elastic element, since it has a well-known constant elasticity and can be very precisely manufactured in relation to the desired dimensions, for example, by etching.
    An inertial element 3 is fixed at the upper end of the elastic element 2. This inertial element 3 consists of a housing 4 and a surrounding housing 4 of the coating 5 to create the required surface quality of the inertial element 3.
    The shape of the elastic element 2 in the form of a board was chosen so that the acceleration sensor selectively determines the acceleration component in a well-defined predetermined spatial direction. This acceleration component extends at right angles to the plane of the elastic element 2, made in the form of a bending vibrator. To achieve the desired constant elasticity in the area between the clamp on the base 1 and the mass 3 can be provided with windows 6 in the plate of the elastic element 2.
    From the bases 1, a stand 7 protrudes upwards, on which a moving device 9 for the tip is fixed through the insulator 8
    10. The moving device 9 consists of a piezocrystal, on the opposite ends of the sides of which electrodes 11, 12 are provided. The tip 10 is mounted on the electrode 12 with the intermediate inclusion of insulation 13 so that it is directed to the side surface of the inertial element 3.
    If the inertial element 3 is affected by an acceleration force directed across the surface of the elastic element 2, then the elastic element 2 acts as a bending vibrator, that is, it bends so that the inertial element 3 moves either in the direction of the tip 10 or away from it. The acceleration sensor is highly selective in direction. To determine the accelerations in both other: spatial directions, the same acceleration sensors can be provided, respectively, in which the elastic element is located at right angles to the elastic element 2.
    The entire acceleration sensor is located in a pressure-tight housing 14, which includes a pipe 15 connected to a gas source.
    Next, with the help of FIG. 2, the principal method of action of the acceleration sensor is explained.
    The tip 10 is located at a small distance from the inertial element 3. This distance is several 10-10 m. The current source 16 is connected by one pole to the elastic element 2 and through this elastic element is connected to the electrically conductive inertial element 3. The other pole of the current source 16 through the ammeter 17 also connected by a conductive tip 10. A current source 16, whose voltage is 6 volts, produces a tunneling current between the tip 10 and the inertial element 3, the strength of which is measured by an ammeter 17. The output signal is an ammeter 17 is supplied to the regulator 18, which controls the high voltage source 19. The output wires of the high voltage source 19 are connected to the electrodes 11 and 12 at both ends of the transfer device 9. Due to the fact that this transfer device 9 consists of a piezoelectric crystal, it changes its length depending on the magnitude of the high voltage applied at its ends. The controller 18 varies the length of the moving device 9 so that the tunneling current between the tip 10 and the inertial element 3 remains constant. Due to this, the distance between the tip 10 and the inertial element also remains constant, that is, the tip 10 monitors the movement of the inertial element 3 with a constant distance. The output signal 20 of the controller 18 forms a measuring signal proportional to the deviation of the inertial element 3 from its initial position.
    To calibrate the acceleration sensor, a measurement is performed when the inertial element 3 acts, at first, by the unknown acceleration force, and an output signal is obtained on the output line 20. This change is made when there is a low gas density in the housing 14. For this, the gas pressure in the housing 14 is reduced. Subsequently, through the connection 15, the gas pressure and thereby the gas density in the housing 14 are increased until a certain gas density is established. Then make a second measurement at the same available acceleration. Due to the increased lifting force of the inertial element 3 in the second measurement, the deviation of the inertial element from its initial position is smaller than in the first measurement. Therefore, the signal on the output line 20 is also reduced. Due to both measurements with different lifting forces directed opposite to the acceleration force and the different signals achieved on the output line 20, the proportionality between the output signal and the absolute acceleration is determined. Thus, the acceleration sensor is calibrated.
    Following calibration, acceleration measurements can be made for a long time, using either a reduced gas density or an increased gas density. Due to the fact that the gas can be removed from the housing 14, it is possible to carry out calibration cycles with an arbitrary frequency.
    In the embodiment of FIG. 3, in addition to the described sensor element, the tip 10 of which is located on one side of the inertia element 3, the next sensor element is located on the opposite side, the components of which correspond to the components of the first sensor element and are provided with the same reference positions, and additive a is added accordingly. When the inertial element deviates from its initial position in one direction, one movement device 9, respectively 9a, is shortened, while the opposite movement device expands. The example of FIG. 3 is advisable in cases where the tunneling current between the tip 10 and the inertial element 3 changes only due to the changed gas pressure, or in the case when the impurities on the surface of the inertial element 3 change this tunneling current. Both controllers 9 and 9a are interconnected so that their output signals are subtracted. In the normal case, the output signals of the regulators 9 and
    Ί
    18a are equal in magnitude and different in sign, so subtracting these output signals gives a value of 0 when the inertial element 3 is in its middle position. However, the difference of the output signals of the regulators 9 differs from 0 in the case when the inertial element 3 is in a deviated position. Thus, this difference is used as a measuring signal.
    In the above described embodiments, the inertial element carried by the elastic body is freely movable. It is also possible a form of implementation in which a return device acts on the inertial element, so that this element is held in the same position for all the accelerating forces acting. In this case, to measure the acceleration, the force that is applied by the return device in order to hold the inertial element in a predetermined position can be used. In this case, the sensor element serves to regulate the force of the return device.
    权利要求:
    Claims (4)
    [1]
    Claim
    1. The method of calibration of the acceleration sensor, which consists in measuring with the help of a sensing element the deflection of the inertial element fixed on the elastic element under the action of acceleration, characterized in that, with the chain for increasing the calibration accuracy, the density of the medium surrounding the inertial element is changed, and the acceleration is measured at the same acceleration the deviation of the inertial element at different densities of the medium, and based on the dependence of the deviation of the inertial element on the density of the medium, the absolute acceleration is determined taking into account estno constant force system consisting of the inertial and elastic elements.
    [2]
    2. An acceleration sensor comprising a housing in which an inertial element is mounted, mounted on an elastic element, and a sensing element for determining the position of the inertial element, characterized in that, in order to improve the measurement accuracy, the inertial element is electrically conductive, the sensitive element is made in the form of on the inertial element of the tip, equipped with a device for moving it to maintain a constant distance between the inertial element and the tip, while the last connection n with a measuring circuit including an ammeter connected to a current source, the positive pole of which is connected through an elastic element to an inertial element, an adjustable voltage source connected to the outputs of the electrodes of the tip moving device, and the input to the output of the regulator connected to the ammeter, the case made airtight, and its cavity is filled with gas or liquid.
    [3]
    3. The sensor according to claim 2, characterized in that, in order to measure alternating acceleration, a second similar sensing element is introduced into it, located on the other side of the inertial element and connected to the introduced second measuring circuit, similar to the first.
    fae. /
    [4]
    7 // 777 // 777/77
    Compiled by T. Makarova Editor S. Kulakova Tehred M. Morgenthal Corrector G. Kos *
    Order 2370 Circulation Subscription
    VNIIIPI of the State Committee for Inventions and Discoveries at the State Committee for Science and Technology
    113035, Moscow, Zh-35, Raushskaya nab., 4/5
    Production and Publishing Plant Patent '', Uzhgorod, 101 Gagarin St.
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    同族专利:
    公开号 | 公开日
    DE3917611C2|1991-08-29|
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    FR2647907A1|1990-12-07|
    US5048319A|1991-09-17|
    FR2647907B1|1992-03-13|
    引用文献:
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    RU2669164C1|2017-08-01|2018-10-08|Публичное акционерное общество "Ракетно-космическая корпорация "Энергия" имени С.П. Королева"|Method for calibration of microacceleration sensor in space flight|US3570315A|1969-08-11|1971-03-16|Us Air Force|Flotation technique for calibration of low-level accelerometers|
    US3691850A|1970-02-24|1972-09-19|North American Rockwell|High sensitivity accelerometer|
    DE2150052A1|1971-09-29|1972-04-20|Westinghouse Electric Corp|Switch arrangement for displaying a certain acceleration|
    US4283952A|1979-05-21|1981-08-18|Laser Technology, Inc.|Flaw detecting device and method|
    GB2158243B|1984-05-05|1986-10-22|Ferranti Plc|Accelerometer system|
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    JP3030866B2|1990-12-26|2000-04-10|住友電気工業株式会社|Zero compensation device for gravity accelerometer|
    US5178012A|1991-05-31|1993-01-12|Rockwell International Corporation|Twisting actuator accelerometer|
    US5526703A|1992-08-21|1996-06-18|Smiths Industries Aerospace & Defense Systems, Inc.|Force detecting sensor and method of making|
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    法律状态:
    优先权:
    申请号 | 申请日 | 专利标题
    DE19893917611|DE3917611C2|1989-05-31|1989-05-31|
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